Hatice ASIL UĞURLU, Hatice VAROL ÖZKAVAK

AISI 304 Paslanmaz Çeliğin Spin Yöntemi Kullanılarak TiO2 Filmi İle Kaplanması ve Yapısal Özelliklerinin Araştırılması

Bu çalışmada iyi pasiflik, düşük iletkenlik ve iyi tribolojik özelliklere sahip TiO2 seramik oksit filmi sol jel spin kaplama yöntemi ile paslanmaz çelik (AISI 304) malzemesi kaplanmıştır. Kaplanan TiO2 filmlerin yapısına tavlama sıcaklığı ve süresinin etkisi incelenmiştir. Kaplama işlemi için Ethyl acetoacetate (EAcAc), etanol ve titanium kaynağı olarak Tetra-n-butyl orthotitanate (TBT) kullanılmıştır. TiO2 ince film kaplama işleminde spin döndürme hızı olarak 2600 devir/dakika seçilmiştir. Tavlama süresinin ve sıcaklığının kaplama yapısına etkisini incelemek amacıyla 1 ve 1,5 saat işlem sürelerinde ve 500 °C, 600 °C, 700 °C işlem sıcaklıklarında tavlama uygulanmıştır. Yapılan kaplamaların yapısal özellikleri XRD ve SEM analizleri ile incelenmiştir. Yapılan analizlere göre elde edilen piklerin anataz ve rutile fazında olduğu belirlenmiştir. XRD sonuçları incelendiğinde bütün sıcaklıklarda ve sürelerde baskın pikin Rutile (210) fazı olduğu görülmüştür. Ayrıca XRD analizlerinden R(210) fazı için kristal boyutu (D), dislokasyon yoğunluğu (δ) ve gerinim (ε) gibi parametreler belirlenmiştir. Çalışma sonrasında tavlama sıcaklığının ve süresinin yüzey morfolojisini değiştirdiği SEM analizleri belirlenmiştir.

Anahtar Kelimeler:

İnce Film, Spin Kaplama, Tavlama sıcaklığı, Tavlama süresi, TiO2.

Coating TiO2 Film Using the Spin Method of AISI 304 Stainless Steel and Investigation of the Structural Properties

In this study, TiO2 ceramic oxide film with good passivity, low conductivity and good tribological properties was coated on stainless steel (AISI 304) material by sol gel spin coating method. The effect of annealing temperature and time on the structure of the coated TiO2 films was investigated. Ethyl acetoacetate (EAcAc), ethanol and as titanium source Tetra-n-butyl orthotitanate (TBT) was used for the coating process. In the TiO2 thin film coating process, 2600 rpm was chosen as the spin rotation speed. In order to examine the effect of annealing time and temperature on the coating structure, annealing was applied at treatment times of 1 and 1.5 hours and at processing temperatures of 500 °C, 600 °C, 700 °C. The structural properties of the coatings were investigated by XRD and SEM analysis. It was determined that the peaks obtained according to the analyzes were in the anatase and rutile phases. When the XRD results were examined, it was seen that the dominant peak was the Rutile (210) phase at all temperatures and times. In addition, parameters such as crystal size (D), dislocation density (δ) and strain (ε) were determined for the R(210) phase from XRD analysis. After the study, SEM analyzes were determined that the annealing temperature and time changed the surface morphology.

Keywords:

Annealing temperature, Annealing time, Spin Coating, Thin Films, TiO2.,

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