Olcay GENÇYILMAZ, Seniye KARAKAYA, Ferhunde ATAY, İdris AKYÜZ

Co Katkılı ZnO İnce Filmlerinin Üretimi ve Karakterizasyonu

Son yıllarda, ZnO saydam iletken oksit ince filmlerinin Mn, Fe, Ir ve Co gibi geçiş metal oksitleri ile katkılandığında ilginç özelliklere sahip olması dikkat çekmektedir. Bu çalışmada, katkısız ve Co katkılı (% 12 ) ZnO filmleri 320 ± 5 °C taban sıcaklığındaki cam tabanlar üzerine ultrasonik kimyasal püskürtme tekniği (UKP) kullanılarak depolanmıştır. Co katkısının ZnO ince filmlerinin optik, elektrik, yapısal ve yüzeysel özellikleri üzerine etkisi araştırılmıştır

Production and Characterization of Co-doped ZnO Thin Films

Recently, ZnO transparent conductive oxide films have been noticed that these films may possess interesting properties when doped by transition metal such as Mn, Fe, Ir and Co. In this study, undoped and Co-doped (at. 12 %) ZnO films have been produced on the glass substrates at 320 ± 5 °C by ultrasonic chemical spray pyrolysis (UCPS) technique. The effect of Co-doping on structural, optical, electrical and surface properties of ZnO films has been investigated

Keywords:

ZnO UCSP, SE, four probe technique, AFM,

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