İnce filmlerin optik özelliklerinin elipsometrik yöntemle belirlenmesi

Bu çalışmada ince filmlerin optiksel karakterizasyonunda sıkça kullanılan polarimetrik bir yöntem olan Elipsometri tekniği incelenmiştir. Yapılan çalışmada bir elektromagnetik dalganın elipsometre düzeneği içersindeki davranışı ayrıntılı olarak ele alınmıştır. Daha sonra elipsometrik parametreler ve denklemler tanımlanmış ve her hangi bir ince film için kırılma indisi ve soğurma katsayısının elipsometrik yöntemle nasıl hesaplandığı açıklanmıştır.

Determination of optical properties of thin films by ellipsometry technique

In this study, the ellipsometry technique which has been used widely in characterisation of thin films are studied. Here, firstly the behaviour of electromagnetic wave within ellipsometry setup are investigated in details. Then, ellipsometrical parameters and related equations are introduced and method by which the refractive index and extinction coefficient of any thin film are determined, has been explained.

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