Fikret YILDIZ

Comparison of Two Different Circular Diaphragm Models with Central Mass for MEMS Based FPI Pressure Sensor Performance Based on Sensitivity and Frequency Response

The sensitivity and the fundamental frequency of circular membrane with a central mass (embossment) were analytically evaluated for Fabry- Pérot interferometers (FPI) based pressure sensor. Two different previously developed model (named as M1 and M2, respectively in this study), which includes a diaphragm with center embossment, were considered to obtain results and performance of models were compared. Thickness of diaphragms were 5 µm and 10 µm with the radius of 300 µm, 500 µm,600 µm and 700 µm, respectively. According to the results, it was noted that diaphragm considering M1 model shows higher sensitivity and displacement compared to diaphragm considering M2 model. 155.15-102.87 nm/kPa and 149.5-39.7 nm/kPa sensitivity range were calculated for the diaphragm based on the M1and M2 model, respectively when 300 µm in radius and 5 µm thick diaphragm was used. Moreover, frequency response of diaphragm considering two different model is slightly different for thinner embossment; however, same frequency response was calculated for thicker embossment. For example, frequency range of 700 µm in radius and 10 µm was changes between 42-22.7 kHz and 42.2- 22.7 kHz when M1 and M2 model was considered. It was understand that compared with the conventional circular diaphragm (CD) model, non-uniform diaphragm with a central mass provides more geometrical parameters to tune the device performance (sensitivity) and it provides design flexibility on the sensor structure.

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[1] A. P. Jathoul et al., “Deep in vivo photoacoustic imaging of mammalian tissues using a tyrosinase-based genetic reporter,” Nat. Photonics, vol. 9, no. 4, pp. 239–246, 2015.
[2] J. Zhu, L. Ren, S. C. Ho, Z. Jia, and G. Song, “Gas pipeline leakage detection based on PZT sensors,” Smart Mater. Struct., vol. 26, no. 2, 2017.
[3] X. Qi et al., “Fiber Optic Fabry-Perot Pressure Sensor with Embedded MEMS Micro-Cavity for Ultra-High Pressure Detection,” J. Light. Technol., vol. 37, no. 11, pp. 2719–2725, 2019.
[4] H. F. Zhang, K. Maslov, G. Stoica, and L. V. Wang, “Functional photoacoustic microscopy for high-resolution and noninvasive in vivo imaging,” Nat. Biotechnol., vol. 24, no. 7, pp. 848–851, 2006.
[5] W. Ni et al., “Ultrathin graphene diaphragm-based extrinsic Fabry-Perot interferometer for ultra-wideband fiber optic acoustic sensing,” Opt. Express, vol. 26, no. 16, p. 20758, 2018.
[6] J. Liu et al., “Fiber-optic Fabry–Perot pressure sensor based on low-temperature co-fired ceramic technology for hightemperature applications,” Appl. Opt., vol. 57, no. 15, p. 4211, 2018.
[7] B. Liang et al., “Highly Sensitive, Flexible MEMS Based Pressure Sensor with Photoresist Insulation Layer,” Small, vol. 13, no. 44, pp. 1–7, 2017.
[8] I. Padron, A. T. Fiory, and N. M. Ravindra, “Modeling and design of an embossed diaphragm fabry-perot pressure Sensor,” Mater. Sci. Technol. Conf. Exhib. MS T’08, vol. 2, no. October 2017, pp. 992–997, 2008.
[9] C. Liao et al., “Sub-micron silica diaphragm-based fiber-tip Fabry–Perot interferometer for pressure measurement,” Opt. Lett., vol. 39, no. 10, p. 2827, 2014.
[10] Y. Zhang, L. Yuan, X. Lan, A. Kaur, J. Huang, and H. Xiao, “High-temperature fiber-optic Fabry–Perot interferometric pressure sensor fabricated by femtosecond laser,” Opt. Lett., vol. 38, no. 22, p. 4609, 2013.
[11] F. Xu et al., “High-sensitivity Fabry–Perot interferometric pressure sensor based on a nanothick silver diaphragm,” Opt. Lett., vol. 37, no. 2, p. 133, 2012.
[12] Z. Li et al., “Highly-sensitive gas pressure sensor using twin-core fiber based in-line Mach-Zehnder interferometer,” Opt. Express, vol. 23, no. 5, p. 6673, 2015.
[13] S. J. Mihailov, D. Grobnic, C. W. Smelser, P. Lu, R. B. Walker, and H. Ding, “Bragg grating inscription in various optical fibers with femtosecond infrared lasers and a phase mask,” Opt. Mater. Express, vol. 1, no. 4, p. 754, 2011.
[14] S. Liu et al., “Nano silica diaphragm infiber cavity for gas pressure measurement,” Sci. Rep., vol. 7, no. 1, pp. 1–9, 2017.
[15] H. Y. Choi, G. Mudhana, K. S. Park, U.-C. Paek, and B. H. Lee, “Cross-talk free and ultra-compact fiber optic sensor for simultaneous measurement of temperature and refractive index,” Opt. Express, vol. 18, no. 1, p. 141, 2010.
[16] M. Deng, T. Zhu, Y. J. Rao, and H. Li, “Miniaturized fiber-optic fabry-perot interferometer for highly sensitive refractive index measurement,” 2008 1st Asia-Pacific Opt. Fiber Sensors Conf. APOS 2008, vol. 16, no. 8, pp. 14123– 14128, 2008.
[17] L. Zhang et al., “A diaphragm-free fiber Fabry-Perot gas pressure sensor,” Rev. Sci. Instrum., vol. 90, no. 2, 2019.
[18] M. Nespereira, J. M. P. Coelho, and J. M. Rebordão, “A refractive index sensor based on a Fabry-Perot interferometer manufactured by NIR laser microdrilling and electric arc fusion,” Photonics, vol. 6, no. 4, 2019.
[19] X. Wang et al., “Non-destructive residual pressure self-measurement method for the sensing chip of optical Fabry-Perot pressure sensor,” Opt. Express, vol. 25, no. 25, p. 31937, 2017.
[20] J. Zhu, M. Wang, L. Chen, X. Ni, and H. Ni, “An optical fiber Fabry–Perot pressure sensor using corrugated diaphragm and angle polished fiber,” Opt. Fiber Technol., vol. 34, no. 1, pp. 42–46, 2017.
[21] M. Manuvinakurake, U. Gandhi, M. Umapathy, and M. M. Nayak, “Bossed diaphragm coupled fixed guided beam structure for MEMS based piezoresistive pressure sensor,” Sens. Rev., vol. 39, no. 4, pp. 586–597, 2019.
[22] X. Wang, B. Li, O. L. Russo, H. T. Roman, K. K. Chin, and K. R. Farmer, “Diaphragm design guidelines and an optical pressure sensor based on MEMS technique,” Microelectronics J., vol. 37, no. 1, pp. 50– 56, 2006.
[23] S. S. Kumar and B. D. Pant, “Polysilicon thin film piezoresistive pressure microsensor: design, fabrication and characterization,” Microsyst. Technol., vol. 21, no. 9, pp. 1949–1958, 2015.
[24] B. Tian et al., “Fabrication and structural design of micro pressure sensors for Tire Pressure Measurement Systems (TPMS),” Sensors, vol. 9, no. 3, pp. 1382–1393, 2009.
[25] Z. Yu, Y. Zhao, L. Sun, B. Tian, and Z. Jiang, “Incorporation of beams into bossed diaphragm for a high sensitivity and overload micro pressure sensor,” Rev. Sci. Instrum., vol. 84, no. 1, 2013.
[26] Y. Sun, G. Feng, G. Georgiou, E. Niver, K. Noe, and K. Chin, “Center embossed diaphragm design guidelines and FabryPerot diaphragm fiber optic sensor,” Microelectronics J., vol. 39, no. 5, pp. 711– 716, 2008.
[27] Z. Gong, K. Chen, Y. Yang, X. Zhou, and Q. Yu, “Photoacoustic spectroscopy based multi-gas detection using high-sensitivity fiber-optic low-frequency acoustic sensor,” Sensors Actuators, B Chem., vol. 260, pp. 357–363, 2018.
[28] S. E. Hayber, T. E. Tabaru, and O. G. Saracoglu, “A novel approach based on simulation of tunable MEMS diaphragm for extrinsic Fabry–Perot sensors,” Opt. Commun., vol. 430, no. August 2018, pp. 14–23, 2019.
[29] D. B. Duraibabu et al., “An optical fibre depth (pressure) sensor for remote operated vehicles in underwater applications,” Sensors (Switzerland), vol. 17, no. 2, pp. 1– 12, 2017.
[30] Z. Gong, K. Chen, Y. Yang, X. Zhou, W. Peng, and Q. Yu, “High-sensitivity fiberoptic acoustic sensor for photoacoustic spectroscopy based traces gas detection,” Sensors Actuators, B Chem., vol. 247, pp. 290–295, 2017.
[31] C. Fu, W. Si, H. Li, D. Li, P. Yuan, and Y. Yu, “A novel high-performance beamsupported membrane structure with enhanced design flexibility for partial discharge detection,” Sensors (Switzerland), vol. 17, no. 3, 2017.
[32] W. Ma, Y. Jiang, J. Hu, L. Jiang, and T. Zhang, “Microelectromechanical systembased, high-finesse, optical fiber Fabry– Perot interferometric pressure sensors,” Sensors Actuators, A Phys., vol. 302, no. September, p. 111795, 2020.
[33] F. Wang, Z. Shao, J. Xie, Z. Hu, H. Luo, and Y. Hu, “Extrinsic fabry-pérot underwater acoustic sensor based on micromachined center-embossed diaphragm,” J. Light. Technol., vol. 32, no. 23, pp. 4026–4034, 2014.
[34] Y. Yu et al., “Design of a Collapse-Mode CMUT with an Embossed Membrane for Improving Output Pressure,” IEEE Trans. Ultrason. Ferroelectr. Freq. Control, vol. 63, no. 6, pp. 854–863, 2016.
[35] W. Zhang, H. Zhang, F. Du, J. Shi, S. Jin, and Z. Zeng, “Pull-In Analysis of the Flat Circular CMUT Cell Featuring Sealed Cavity,” Math. Probl. Eng., vol. 2015, 2015.
[36] M. Chattopadhyay and D. Chowdhury, “Design and performance analysis of MEMS capacitive pressure sensor array for measurement of heart rate,” Microsyst. Technol., vol. 23, no. 9, pp. 4203–4209, 2017.
[37] H. Gharaei and J. Koohsorkhi, “Design and characterization of high sensitive MEMS capacitive microphone with fungous coupled diaphragm structure,” Microsyst. Technol., vol. 22, no. 2, pp. 401–411, 2016.
[38] J. Baltrušaitis, “Methylated Poly(ethylene)imine Modified Capacitive Micromachined Ultrasonic Transducer for Measurements of CO2 and SO2 in Their Mixtures,” Sensors, vol. 19, no. 3236, 2019.
[39] J. Ma, Miniature Fiber-Tip Fabry–Perot Interferometric Sensors for Pressure and Acoustic Detection (Doctoral dissertation), The Hong Kong Polytechnic University, 2014. http://hdl.handle.net/10397/7136.