Comparison of Two Different Circular Diaphragm Models with Central Mass for MEMS Based FPI Pressure Sensor Performance Based on Sensitivity and Frequency Response

Comparison of Two Different Circular Diaphragm Models with Central Mass for MEMS Based FPI Pressure Sensor Performance Based on Sensitivity and Frequency Response

Sakarya Üniversitesi Fen Bilimleri Enstitüsü Dergisi

2021-Cilt: 25 - Sayı: 3

619-628

2118

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