O. Faruk FARSAKOĞLU

Determination of Effective Parameters on Ion Energy of a Plasma Ion Source Using O2

Determination of Effective Parameters on Ion Energy of a Plasma Ion Source Using O2

Savunma Bilimleri Dergisi

2007-Cilt: 6 - Sayı: 1

20-35

İyon Destekli İnce Film Kaplama, Optik İnce Film, Plazma İyon Kaynağı

Ion-assisted Thin Film Deposition, Optical Thin Film, Plasma Ion Source

7745