Hilal Kübra SAĞLAM, Sevda SARITAŞ, Mehmet ERTUGRUL

USP Tekniği ile Çeşitli Öncülerin ZnO İnce Filmler Üzerindeki Etkisi

ZnO düşük maliyetinden ve sahip olduğu avantajlı özelliklerinden dolayı ince film kaplamada kullanılan başlıca malzemelerdendir. Bu çalışmanın amacı, ultrasonik sprey piroliz (USP) tekniği ile kaplanmış çinko oksit ince filmlerin optik, morfolojik ve yapısal özelliklerini incelemektir. ZnO ince filmler, çinko asetat ve çinko nitrat gibi farklı öncü çözeltiler kullanılarak 450°C'de büyütülmüştür. Bu işlemlerde cam altlık kullanılmıştır. 0.1M ve 100 mL çözeltiler hazırlanmıştır. XRD desenlerine göre büyüme yönelimleri (002) şeklindedir. Çinko asetat ve çinko nitrat için bandgap değerleri sırasıyla, 3.25 eV ve 3.13 eV olarak ölçülmüştür. Ayrıca Debye-Scherrer hesaplamalarından anlaşıldığı üzere öncü tuz olarak seçilen çinko asetat ile elde edilen filmlerin ZnO tane boyutu öncü tuz olarak seçilen çinko nitrat ile elde edilen filmle hemen hemen aynıdır. Son olarak ZnO filmlerdeki oksijen miktarı farklı çözeltilere ve çinko tuzlarına bağlı olarak farklılık gösterir.

Anahtar Kelimeler:

Gaz Sensörü, İnce Film, ZnO İnce Film, Ultrasonik Sprey Piroliz(USP)., Gaz Sensörü, İnce Film, ZnO İnce Film, Ultrasonik Sprey Piroliz(USP).

Effect of Various Precursors on ZnO Thin Films by USP Technique

ZnO is one of the main materials used in thin film coating due to its low cost and advantageous properties. The aim of this study is to examine the optical, morphological and structural properties of zinc oxide thin films coated with ultrasonic spray pyrolysis(USP) technique. ZnO thin films were grown at 450°C using different precursor solutions such as zinc acetate and zinc nitrate. Glass substrate was used in these processes. 0.1M and 100 ml solutions were prepared. Growth orientations according to XRD patterns are (002). Bandgap values for zinc acetate and zinc nitrate were measured as 3.25 eV and 3.13 eV, respectively. In addition, as can be seen from the SEM images, the ZnO grain size of the films obtained with the zinc acetate salt is smaller than that of the zinc nitrate. Finally, the amount of oxygen in ZnO films varies depending on different solutions and zinc salts.

Keywords:

Gas Sensor, Thin Film, ZnO Thin Film, Ultrasonic Spray Pyrolysis(USP,

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Erzincan Üniversitesi Fen Bilimleri Enstitüsü Dergisi-Cover

ISSN: 1307-9085
Yayın Aralığı: Yılda 3 Sayı
Başlangıç: 2008
Yayıncı: Erzincan Binali Yıldırım Üniversitesi, Fen Bilimleri Enstitüsü

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