Levent TRABZON

3518

Mikrokanalların üretim metodları

Mikrokanallar mikro-akışkan sistemlerinin temel unsurlarından olduğundan, mikrokanalların üretimi çok önemlidir. Birçok farklı üretim metodu vardır: Si yüzey mikroişleme. Si gövde mikroişleme ve polimer mikroişleme gibi. Polimerlerin kullanımı özgün bir üretim teknolojisi oluşturduğundan, mikrokanalların polimerden yapılması ayrı olarak incelenecektir. Seçilen üretim teknolojisine göre, mikrokanalların genişliği birkaç mikrometreden yüz mikrometre seviyelerinde, ayrıca mikrokanalın yüksekliği birkaç mikrometreden on mikrometre mertebelerinde olabilir. Mikrokanallar metallerden, camdan, seramiklerden ve polimerden üretilebilinir. Geniş bir malzeme seçeneği olması, her tür malzeme türünün içerdiği zorlukları da beraberinde getirir. Mikrokanalın üretimm metodunun seçimi, tümleşik devre teknolojisi uyumluluğu, üretimde yüksek verime, silisyum plakasının çok amaçlı kullanımına imkan vermesi ve özel tasarımların getirdiği şartlar gibi parametrelere bağlı olarak belirlenir.

The methods of fabricating micro channels

The fabrication of microchannels is very critical part of microfluidic devices since the microchannels are essential part of tnem. There are several ways of fabricating of microchannels: Si surface micromachining. Si bulk micro-machining and polymer micro-machining. Since the use of polymers gives us a unique fabrication scheme tor microchannels formation, it is evaluated as a separate section in the text. Depending on the choice of the method, the width of microchannels can be several microns to hundreds of microns as well as the height of microchannel can be also tailored in a range from 1 micron to several ten microns. The microchannels are made of metals, ceramics, glass and polymers, thus there is a wide range of selection for materials, but, with some constraints by fabrication. The IC technology compatibility, high yield multi-purpose use of silicon wafer and customized characteristics are just main parameters in choosing the type of methods for the fabricating of microchannnels.
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Mühendis ve Makina-Cover
  • ISSN: 1300-3402
  • Yayın Aralığı: Yılda 4 Sayı
  • Başlangıç: 1957
  • Yayıncı: TMMOB MAKİNA MÜHENDİSLERİ ODASI
Arşiv
Sayıdaki Diğer Makaleler

Akışkan-mikroelektromekanik sistemler

L.Berrin ERBAY, Levent İNAL, Mehmet Mete ÖZTÜRK

Mikrokanalların üretim metodları

Levent TRABZON

Akışkanlar: Mikro-akışkanlar modellemesinin kutsal kasesi

Mohammed GAD-EL-HAK