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Nano-Gözenekli Silisyumun Mikro ve Makro Ölçekte Fotolüminesans Homojenliğinin Görüntü Spektroskopisi Yöntemi ile İncelenmesi

Gözenekli Silisyumdan (PS) oda sıcaklığında görünür bölgede etkili lüminesans (PL) gözlenmesi son yılların oldukça popüler konularındandır. Bunun altında yatan temel neden mevcut silisyum teolojisi ile birleştirilerek optoelektronikte pek çok uygulama alanın olmasıdır. Fakat özellikle ışık yayan diyot (LED) uygulamalarına geçilmeden önce lüminesans homojenliği probleminin çözülmesi gerekmektedir. Bu çalışmada Gözenekli Silisyumun fotolüminesans (PL) özelliği makro (95 mm2) ve mikro (10 µm2) ölçekte uzaysal dağılımı görüntü spektroskopisi (IS) yöntemi ile incelenmiştir. PL’nin uzaysal dağılımının incelenen ölçeklerde homojen olmadığı ve PS lüminesans homojenliğinin üretim parametrelerinden ve anodizasyon sonrası çevre koşullarından etkilendiği tespit edilmiştir. Lüminesans şiddetinin ve homojenliğinin atmosferik yaşlanmaya bağlı olarak arttığı görülmüştür.

Investigation of Photoluminescence Homogeneity Distribution of Nano-Porous Silicon by Imaging Spectroscopy

The observation of effective luminescence (PL) from the porous silicon (PS) at the visible region at room temperature is one of the prevalent topics in recent years. This is why there are many application areas in optoelectronics integration with the existing silicon technology. However, non-uniformity of PL is an important problem and should be solved before using its future applications as light emitting diodes (LEDs). In this study, spatial distribution properties of photoluminescence of porous silicon were investigated by imaging spectroscopy (IS) on macro (95 mm2) and micro (10 µm2) scale. It has been showed that the spatial distribution of PL is not homogeneous. The PS luminescence homogeneity is also affected by the production parameters and the post-anodization environmental conditions. It was showed that luminescence intensity and luminescence homogeneity increased with atmospheric aging

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