Magnetron Sıçratma Yöntemi ile Büyütülen Elmas Benzeri Karbon Filmlerin Adezyon ve Çoklu-Çizik Test Davranışlarının Araştırılması

Elmas benzeri karbon (DLC) ince filmler sahip oldukları düşük sürtünme katsayısı, yüksek sertlik, yüksek

Anahtar Kelimeler:

Adezyon, DLC, magnetron sıçratma

Investigation of Adhesion and Multi-pass Scratch Test Behaviour of Magnetron Sputtered Diamond-Like Carbon Films

Diamond-like carbon (DLC) thin films are now widely spread over a wide variety of base materialsdue to their low coefficient of friction, high hardness, high abrasion resistance and chemical inactivity. Animportant aspect of such coatings is the adhesion of the coating to the substrate. In this study, The DLC films werecoated on the inconel substrates with magnetron sputtering method using TiN and TiCN interlayers to increase theadhesion and to obtain higher strength. Structural, mechanical, adhesion and fatigue-like behaviors of the filmswere characterized. X-ray diffractometer (XRD) and scanning electron microscope (SEM) were used for structuraland chemical analysis of the films. To intevtigate mechanical properties, adhesion and fatigue-like properties of thefilms, micro-hardness test, increasingly loaded scratch test and 100,250 and 500 cycles of multi-scratch tests wereapplied to the films. The microhardness of the film dtermined as 39.8 GPa. According to the adhesion tests, the firstcritical load value of the DLC film was determined as 22 N and the film maintained its strength on the substrateuntil the load of 25N. According to the results of the multi-scratch test, it was observed that the DLC films grownby the TiN-TiCN interlayer could be held on the substrate even at the end of 250 cycles.

Keywords:

Adhesion, DLC, magnetron sputtering,

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