Magnetron Sıçratma Yöntemi ile Büyütülen Elmas Benzeri Karbon Filmlerin Adezyon ve Çoklu-Çizik Test Davranışlarının Araştırılması

Elmas benzeri karbon (DLC) ince filmler sahip oldukları düşük sürtünme katsayısı, yüksek sertlik, yüksek

Investigation of Adhesion and Multi-pass Scratch Test Behaviour of Magnetron Sputtered Diamond-Like Carbon Films

Diamond-like carbon (DLC) thin films are now widely spread over a wide variety of base materialsdue to their low coefficient of friction, high hardness, high abrasion resistance and chemical inactivity. Animportant aspect of such coatings is the adhesion of the coating to the substrate. In this study, The DLC films werecoated on the inconel substrates with magnetron sputtering method using TiN and TiCN interlayers to increase theadhesion and to obtain higher strength. Structural, mechanical, adhesion and fatigue-like behaviors of the filmswere characterized. X-ray diffractometer (XRD) and scanning electron microscope (SEM) were used for structuraland chemical analysis of the films. To intevtigate mechanical properties, adhesion and fatigue-like properties of thefilms, micro-hardness test, increasingly loaded scratch test and 100,250 and 500 cycles of multi-scratch tests wereapplied to the films. The microhardness of the film dtermined as 39.8 GPa. According to the adhesion tests, the firstcritical load value of the DLC film was determined as 22 N and the film maintained its strength on the substrateuntil the load of 25N. According to the results of the multi-scratch test, it was observed that the DLC films grownby the TiN-TiCN interlayer could be held on the substrate even at the end of 250 cycles.

Keywords:

Adhesion, DLC magnetron sputtering,

Tam Metin

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Bibtex	`@araştırma makalesi { jist407877, journal = {Journal of the Institute of Science and Technology}, issn = {2146-0574}, eissn = {2536-4618}, address = {}, publisher = {Iğdır Üniversitesi}, year = {2018}, volume = {8}, pages = {209 - 217}, doi = {10.21597/jist.407877}, title = {Magnetron Sıçratma Yöntemi ile Büyütülen Elmas Benzeri Karbon Filmlerin Adezyon ve Çoklu-Çizik Test Davranışlarının Araştırılması}, key = {cite}, author = {Çiçek, Hikmet} }`
APA	Çiçek, H . (2018). Magnetron Sıçratma Yöntemi ile Büyütülen Elmas Benzeri Karbon Filmlerin Adezyon ve Çoklu-Çizik Test Davranışlarının Araştırılması . Journal of the Institute of Science and Technology , 8 (1) , 209-217 . DOI: 10.21597/jist.407877
MLA	Çiçek, H . "Magnetron Sıçratma Yöntemi ile Büyütülen Elmas Benzeri Karbon Filmlerin Adezyon ve Çoklu-Çizik Test Davranışlarının Araştırılması" . Journal of the Institute of Science and Technology 8 (2018 ): 209-217 <
Chicago	Çiçek, H . "Magnetron Sıçratma Yöntemi ile Büyütülen Elmas Benzeri Karbon Filmlerin Adezyon ve Çoklu-Çizik Test Davranışlarının Araştırılması". Journal of the Institute of Science and Technology 8 (2018 ): 209-217
RIS	TY - JOUR T1 - Magnetron Sıçratma Yöntemi ile Büyütülen Elmas Benzeri Karbon Filmlerin Adezyon ve Çoklu-Çizik Test Davranışlarının Araştırılması AU - Hikmet Çiçek Y1 - 2018 PY - 2018 N1 - doi: 10.21597/jist.407877 DO - 10.21597/jist.407877 T2 - Journal of the Institute of Science and Technology JF - Journal JO - JOR SP - 209 EP - 217 VL - 8 IS - 1 SN - 2146-0574-2536-4618 M3 - doi: 10.21597/jist.407877 UR - Y2 - 2017 ER -
EndNote	%0 Iğdır Üniversitesi Fen Bilimleri Enstitüsü Dergisi Magnetron Sıçratma Yöntemi ile Büyütülen Elmas Benzeri Karbon Filmlerin Adezyon ve Çoklu-Çizik Test Davranışlarının Araştırılması %A Hikmet Çiçek %T Magnetron Sıçratma Yöntemi ile Büyütülen Elmas Benzeri Karbon Filmlerin Adezyon ve Çoklu-Çizik Test Davranışlarının Araştırılması %D 2018 %J Journal of the Institute of Science and Technology %P 2146-0574-2536-4618 %V 8 %N 1 %R doi: 10.21597/jist.407877 %U 10.21597/jist.407877
ISNAD	Çiçek, Hikmet . "Magnetron Sıçratma Yöntemi ile Büyütülen Elmas Benzeri Karbon Filmlerin Adezyon ve Çoklu-Çizik Test Davranışlarının Araştırılması". Journal of the Institute of Science and Technology 8 / 1 (Mart 2018): 209-217 .
AMA	Çiçek H . Magnetron Sıçratma Yöntemi ile Büyütülen Elmas Benzeri Karbon Filmlerin Adezyon ve Çoklu-Çizik Test Davranışlarının Araştırılması. Iğdır Üniv. Fen Bil Enst. Der.. 2018; 8(1): 209-217.
Vancouver	Çiçek H . Magnetron Sıçratma Yöntemi ile Büyütülen Elmas Benzeri Karbon Filmlerin Adezyon ve Çoklu-Çizik Test Davranışlarının Araştırılması. Journal of the Institute of Science and Technology. 2018; 8(1): 209-217.
IEEE	H. Çiçek , "Magnetron Sıçratma Yöntemi ile Büyütülen Elmas Benzeri Karbon Filmlerin Adezyon ve Çoklu-Çizik Test Davranışlarının Araştırılması", Journal of the Institute of Science and Technology, c. 8, sayı. 1, ss. 209-217, Mar. 2018, doi:10.21597/jist.407877