CO2 Gaz Sensörü Uygulamaları için CuO İnce Film Üretimi ve Karakterizasyonu

Katma değeri yüksek, ileri teknoloji ve yüksek maliyet gerektiren malzemelere alternatif olarak ince film kaplama yöntemleri ile eşdeğer yüzey özelliklerine sahip ekonomik malzemeler üretilebilmektedir. İnce film biriktirme yapılarak farklı sensörler, fotovoltaik hücreler, elektronik uygulamalar ve filtreler gibi çeşitli teknolojik malzemelerin temelini oluşturan yarı iletken yüzeyler üretmek mümkündür. Çeşitli fosil yakıtlar ve atıkların yanması ile farklı gazlar açığa çıkmaktadır. Çevreye zarar vermekte ve sağlığa olumsuz etkileri olan bu gazların tespit edilmesi gerekmektedir. CuO yarıiletken ince filmler karbondioksit, etanol, amonyak gibi farklı gazların belirlenmesi ve gerekli uyarıların verilmesinde gaz sensörü olarak kullanımı amacı üzerine çalışmalar yapılmaktadır. Bu çalışma kapsamında cam yüzeyler üzerine CuO yarıiletken ince filmler biriktirilerek gaz sensörü olarak kullanımı test edilmiştir. CuO yarı iletken ince filmlerin CO2 gazının tespitinde alternatif bir gaz sensörü olarak kullanılabileceği tespit edilmiştir.

Anahtar Kelimeler:

CuO, İnce Film, Gaz Sensörü, Daldırarak Kaplama, Yarıiletken

Production and Characterization of CuO Thin Films for CO2 Gas Sensor Applications

As an alternative to materials with high added value, requiring advanced technology and high cost, economical materials with equivalent surface properties can be produced by thin film coating methods. It is possible to produce semiconductor surfaces that form the basis of various technological materials such as different sensors, photovoltaic cells, electronic applications and filters by thin film deposition. Different gases are released with the combustion of various fossil fuels and wastes. These gases, which harm the environment and have negative effects on health, need to be determined. Studies are carried out on the use of CuO semiconductor thin films as gas sensors for the determination of different gases such as carbon dioxide, ethanol, ammonia. In this study, CuO semiconductor thin films were deposited on glass surfaces and its use as a gas sensor was tested. It has been determined that CuO semiconductor thin films can be used as an alternative gas sensor in the detection of CO2 gas

Keywords:

CuO, Thin Film, Gas Sensor, Dip Coating, Semiconductor,

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