Ahmet DURMAZ, Şekip Esat HAYBER, Umut AYDEMİR

Fabry-Perot İnterferometre Tabanlı Sensörlerde Mesa Boyutlarının MEMS Diyaframlar Üzerine Etkisi

Bu çalışmada diyafram tabanlı Fabry-Perot boşluklu fiber optik sensörlerde mesa boyutlarının sensör tepkisine etkileri detaylı olarak incelenmiştir. Literatürde ortası yükseltilmiş veya mesa olarak adlandırılan diyaframlar yeterince tartışılmış fakat mesa kalınlığının sensör performansına etkisi detaylı tartışılmamıştır. Bu tarz diyaframların kesin analitik çözümü ise bulunmamaktadır. Bu nedenle farklı kalınlık ve yarıçapa sahip diyaframlar seçilerek mesanın diyaframdan ince olması ve kalın olması durumlarına göre diyaframın, uygulanan akustik basınca göre esneme ve frekans tepkileri ANSYS programı kullanılarak analiz edilmiştir. Mesanın kalınlığı diyaframın kalınlığından küçük olması durumunda merkez esnemesi ciddi olarak değişmektedir. Ancak mesa kalınlığının diyaframın kalınlığından 2 kat büyük olması durumunda ise esneme sonuçlarında ciddi bir değişim olmamaktadır. Benzer şekilde mesa kalınlığının diyaframdan ince olması durumda sensörün frekans cevabı artan mesa yarıçapı ile ciddi olarak değişmektedir. Mesa kalınlığının diyafram kalınlığından daha büyük olduğu durumlarda ise frekans cevabı daha az değişmektedir. Elde edilen sonuçlara göre mesa diyafram tabanlı Fabry-Perot boşluklu fiber optik sensör tasarlanırken mesa boyutları dikkate alınmalıdır.

Anahtar Kelimeler:

Mesa Diyafram, MEMS, Fabry-Perot İnterferometresi, Fiber Optik Sensör

THE EFFECT OF MESA DIMENSIONS ON MEMS DIAPHRAGMS FOR FABRY-PEROT INTERFEROMETER-BASED FIBER OPTIC SENSORS

In this study, the effects of mesa dimensions on sensor response in diaphragm-based FabryPerot fiber optic sensors (FOSs) were investigated in detail. Mesa diaphragms, also called centerembossed diaphragms, have been discussed sufficiently in the literature, but the effect of mesa thickness on sensor performance has not been discussed in detail. Moreover, there is no precise analytical solution for such diaphragms. For this reason, diaphragms with different thicknesses and radii were selected, and the deflection and frequency responses of the diaphragm according to the applied acoustic pressure were analyzed using the ANSYS software, depending on whether the mesa is thinner or thicker than the diaphragm. If the thickness of the mesa is smaller than the thickness of the diaphragm, the center deflection changes drastically. However, if the thickness of the mesa is two times greater than the thickness of the diaphragm, there is no significant change in the deflection results. Similarly, if the mesa thickness is thinner than the diaphragm, the sensor’s frequency response changes drastically with increasing mesa radius. In cases where the mesa thickness is larger than the diaphragm thickness, the frequency response changes less. According to the results, mesa dimensions should be considered when designing a mesa diaphragm-based Fabry-Perot FOS.

Keywords:

Mesa Diaphragm, MEMS, Fabry-Perot Interferometer, Fiber Optic Sensors,

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