Müjdat ÇAGLAR, Saliha ILICAN, Yasemin ÇAĞLAR

TABAN SICAKLIĞININ ZnO FİLMLERİNİN YAPISAL VE ELEKTRİKSEL ÖZELLİKLERİNE ETKİSİ

Çinko oksit (ZnO) filmleri püskürtme yöntemi kullanılarak farklı taban sıcaklıklarında üretilmiştir. Üretilen bu filmlerin yapısal ve elektriksel özelliklerine taban sıcaklığının etkisi incelenmiştir. Filmlerin x-ışınları kırınım desenlerinden polikristal ve hekzagonal yapıda oldukları görülmüştür. Buradan tanecik boyutu ve yapılanma katsayısı (TC) hesaplanmıştır. ZnO filmlerinin iletkenlikleri karanlıkta ve oda sıcaklığında alınan akım-voltaj ölçümlerinden belirlenmiştir. Bütün filmlerin ohmik iletim mekanizmasına sahip olduğu gözlenmiştir.

Anahtar Kelimeler:

Tanecik boyutu, püskürtme yöntemi, x-ışını kırınım desenleri, ZnO film.

INFLUENCE OF SUBSTRATE TEMPERATURE ON STRUCTURAL AND ELECTRICAL PROPERTIES OF ZnO FILMS

Zinc oxide (ZnO) films have been deposited by spray pyrolysis technique at different substrate temperatures. The effects of substrate temperature on the structural and electrical properties of ZnO films produced by this technique have been investigated. X-ray diffraction spectra of the films have shown that the films are polycrystalline and hexagonal wurtzite in structure. From these spectra, grain size and texture coefficient (TC) are calculated. The conductivity of ZnO films was determined from current-voltage characteristics measured at room temperature and in dark. The ohmic conduction mechanism was observed to take place in all the films.

Keywords:

Grain size, spray pyrolysis technique, x-ray diffraction spectra, ZnO film.,

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