Fabrication of microinjector system (SIM) using anodic aluminum oxide
Fabrication of microinjector system (SIM) using anodic aluminum oxide
The present study provide method to construct a novel type of micro-injector system (MIS) for microfliudic delivery inside nanoporous anodic aluminum oxide (AAO) membrane. Now a day’s these micro and nano combined structure gain attention in medical and biological applications. This fabricated micro-nano structure consists of a thin film of anodic aluminum oxide having 50-100μm wider and 12μm deeper channel. A thin Anodic Aluminum Oxide (AAO) is fabricated by combing Mild anodization in oxalic and Hard anodization (H.A) in sulphuric acid. The dimension and an anisotropic etching were investigated by scanning electron microscopy (SEM). These channels are used for fluid flow on micro scale. These channels are connected with a nozzle like microchannel which can perform fluid injection function. This microinjector system is simply manufactured by embedded microchannel and there is no moving micro part inside nanoporous membrane. Fabrication process is mainly based on photolithography and wet chemical etching technique. Wet chemical etching takes place in 5 wt% of phosphoric acid solution. Dimensions and the shape of these microchannels depend solely on anodization and etching conditions. The presented system can be used into two way: in first way the fluid can be injected through nozzle like channel inside AAO and in second way the liquid can be purify and filtrate through nanoporous AAO membran. This study provides a low cost fabricated micro-nano combined structure which could be further used in different types of microfluidic devices and enable the device to perform the function of injection, filtration and purification.
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- Yayın Aralığı: Yılda 2 Sayı
- Başlangıç: 2018
- Yayıncı: Burdur Mehmet Akif Ersoy Üniversitesi
Sayıdaki Diğer Makaleler
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Fabrication of microinjector system (SIM) using anodic aluminum oxide