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Effect of Development Time on Polymer Phase Separation in a PMMA Resist

Effect of Development Time on Polymer Phase Separation in a PMMA Resist

Turkish Journal of Physics

2004-Cilt: 28 - Sayı: 4

271-276

e-beam; surface roughness; PMMA; phase separation; develop time.

e-beam; surface roughness; PMMA; phase separation; develop time.

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