Tuğçe ATAŞER, Durmuş DEMİR, A.Kürşat BİLGİLİ, M. Kemal ÖZTÜRK, Süleyman ÖZÇELİK

Mosaic Defects of AlN Buffer Layers in GaN/AlN/4H-SiC Epitaxial Structure

Mosaic Defects of AlN Buffer Layers in GaN/AlN/4H-SiC Epitaxial Structure

Politeknik Dergisi

2021-Cilt: 24 - Sayı: 2

511-516

MOCVD, AlN, HR-XRD, XRR, Mosaic defect

MOCVD, AlN, HR-XRD, XRR, mosaic defect

7120