Fikret YILDIZ
Comparison of Two Different Circular Diaphragm Models with Central Mass for MEMS Based FPI Pressure Sensor Performance Based on Sensitivity and Frequency Response
Comparison of Two Different Circular Diaphragm Models with Central Mass for MEMS Based FPI Pressure Sensor Performance Based on Sensitivity and Frequency Response
Sakarya University Journal of Science
2021-Cilt: 25 Sayı: 3
619-628
central embossment,
,
FPI pressure sensor,
,
MEMS,
,
sensitivity analyze
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