Comparison of Two Different Circular Diaphragm Models with Central Mass for MEMS Based FPI Pressure Sensor Performance Based on Sensitivity and Frequency Response

Comparison of Two Different Circular Diaphragm Models with Central Mass for MEMS Based FPI Pressure Sensor Performance Based on Sensitivity and Frequency Response

Sakarya University Journal of Science

2021-Cilt: 25 Sayı: 3

619-628

central embossment, , FPI pressure sensor, , MEMS, , sensitivity analyze

15319

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