Ender Yıldırım, Tayfun Akın, M. A. Sahir Arıkan

MEMS Malzeme Karakterizasyonu için Bütünleşik bir Elektrostatik Mikro Bükülme Test Yapısı Tasarımı ve Gerçekleştirilmesi

MEMS Malzeme Karakterizasyonu için Bütünleşik bir Elektrostatik Mikro Bükülme Test Yapısı Tasarımı ve Gerçekleştirilmesi

Cankaya University Journal of Science and Engineering

2012-Cilt: 9 - Sayı: 1

1-1

Micro electromechanical systems, material characterization, electrostatic actuator

3111

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