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Mikro Elektro Mekanik Sistemler, Genel Bir Tanıtım

Bu makale yeni bir araştırma dalı olan mikro-elektro-mekanik sistem teknolojilerini tanıtmayı hedeflemektedir. Makalede, yüzey/gövde mikro-işleme, elektro-erozyon, lazerle işleme ve yüksek derinlik oranlarına sahip mikro yapıların üretiminde kullanılan LIGA teknikleri gibi başlıca mikro-üretim yöntemleri kısaca ele alınıp, karşılaştırmalı olarak tanıtılacaktır. Bu üretim teknikleriyle yapılmış silisyum tabanlı mikro-duyucu ("micro-sensors") ve mikro eyleyicilere ("micro-actuators") çeşitli örnekler verilecektir. Bu makalede ayrıca mikro-mekanik sistemlerin (dizgelerin) tasarlanmasında kullanılan ölçeklendirme kanunları ele alınacaktır.

Anahtar Kelimeler:

mikro-elektro-mekanik sistemler, mikro-işleme, elektro-erozyon

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ISSN: 1302-9487
Başlangıç: 1986
Yayıncı: Makina Tasarım ve İmalat Derneği

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