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Altın ve Krom İnce Filmlerin Akustik Empedansının Film Kalınlığına Bağlılığının Taramalı Akustik Mikroskopisi ile Araştırılması

Altın (Au) ve krom (Cr) ince filmlerin akustik empedansındaki kalınlığa bağlı değişiklikler, taramalı akustik mikroskobu (TAM) ile incelenmiştir. İnce filmler, 40 nm ile 200 nm arasında değişen kalınlıklarda BK7 cam alt tabakalar üzerinde termal buharlaştırma tekniği ile üretilir. Akustik empedans (AE) modunda, mikroskop ince filmlerin iki boyutlu akustik empedans haritalarını oluşturur ve mikrometre çözünürlüğü bu filmlerdeki yüzey kusurlarının belirlenmesine yardımcı olur. Öte yandan, hem Au hem de Cr ince filmler için artan elastiklik yani sertlik nedeniyle, kalınlık arttıkça akustik empedans değerinin arttığı bulunmuştur. Cr ince filmlerin akustik empedansı 40 nm için 1.901 ± 0.050 MRayl, 80 nm için 1.905 ± 0.045 MRayl, 120 nm için 1.943 ± 0.049 MRayl, 160 nm için 1.964 ± 0.049 MRayl ve 200 nm için 1.987 ± 0.052 MRayl olarak bulundu. Au ince filmlerin akustik empedansı 80 nm için 1.725 ± 0.026 MRayl ve 200 nm için 1.954 ± 0.047 MRayl olarak bulundu. SAM ile elde edilen bu başarı, çok küçük kalınlıklarda bile ince film yüzeylerinin izlenmesindeki potansiyelini göstermektedir.

Examination of Film Thickness Dependence on Acoustic Impedance of Gold and Chromium Thin Films by Scanning Acoustic Microscopy

Thickness induced changes in acoustic impedance of gold (Au) and chromium (Cr) thin films are studied with scanning acousticmicroscopy (SAM). Thin films are produced by thermal evaporation technique on BK7 glass substrates with varyingthicknesses between 40 nm to 200 nm. In acoustic impedance (AI) mode, the microscope generates two-dimensional acousticimpedance maps of the thin films and micrometer resolution helps determining the surface defects on these films. On the otherhand, acoustic impedance value is found to increase as thickness increases for both Au and Cr thin films indicating increasedelasticity, therefore, hardness. The acoustic impedance of Cr thin films were found as 1.901 ± 0.050 MRayl for 40 nm, 1.905± 0.045 MRayl for 80 nm, 1.943 ± 0.049 MRayl for 120 nm, 1.964 ± 0.049 MRayl for 160 nm and 1.987 ± 0.052 MRayl for200 nm. The acoustic impedance of Au thin films were found as 1.725 ± 0.026 MRayl for 80 nm and 1.954 ± 0.047 MRaylfor 200 nm. This success achieved by SAM, demonstrates its potential in monitoring thin film surfaces even with very smallthicknesses.
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International journal of advances in engineering and pure sciences (Online)-Cover
  • Yayın Aralığı: Yılda 4 Sayı
  • Yayıncı: Marmara Üniversitesi
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Altın ve Krom İnce Filmlerin Akustik Empedansının Film Kalınlığına Bağlılığının Taramalı Akustik Mikroskopisi ile Araştırılması

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