Yüksek Sıcaklıkta Gaz Algılaması ve IR Kaynakları İçin Dayanıklı Microhotplate Dizaynı

Microhotplate’ler (MHP) yüksek sıcaklıklarda gaz algılanması, ve IR kaynağı yapımı gibi çok önemli uygulama alanlarına sahip olmasına rağmen, göreceli yüksek sıcaklıklarda çalıştırıldıklarında oluşan yüksek termal stres’lerden dolayı kısa süreli dayanaklığa sahiptirler. Bu çalışmada yüksek sıcaklıklarda düşük termal stres’e sahip bir dizaynı, spring tipi dizaynın ve termal genleşme sabitleri yakın olan malzeme seçimininin avantajlarını birleştirerek elde ettik. FEM sonuçları düşük termal stres elde edebilmesini sağlayan ana etkenin termal genleşme sabitleri yakın malzemeler seçmek olduğunu göstermiştir. SiN/Polysilicon/SiN katmanlarına ship spring tipi dizayn sayesinde 2119 K sıcaklığında 180 MPa gibi düşük termal stres FEM kullanılarak elde edilmiştir. Sıcaklığın 2076 K değerine ulaşması için gereken tepkime süresi ve güç tüketimi 200 ms ve 3.47 mW olarak hesaplanmıştır.

Anahtar Kelimeler:

Microhotplate, MEMS (mikroelektromekanik sistemler ve sensörler), düşük termal stres, yüksek sıcaklık, IR (infrared) kaynağı, gaz algılaması

Reliable Mircohotplate Design for High temperature Gas Sensing and IR Source

While Microhotplates (MHPs) keeps very important place in many critical applications such as high temperature gas sensing and building IR source, they still suffer from short term reliability due to high thermal stress at relatively high temperatures. Here we demonstrate low thermal stress design at high temperatures by combining the advantages of spring type structure and compatible materials in terms of thermal expansion constant. FEM results demonstrated that, the main mechanism behind achieving low thermal stress is using compatible materials. A low thermal stress of 180 MPa at 2119 K was achieved by using SiN/Polysilicon/SiN stack with a spring type design via FEM tool. The response time required to reach 2076 K was calculated as 200 ms with 3.47mW power consumption.

Keywords:

Microhotplate, MEMS (microelectromechanical systems and sensors), low thermal stress, ultra-high temperature, IR source, gas sensing,

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