PVD vakum ortamında HMDSO polimerizasyonunun otomotiv endüstrisi için nümerik olarak incelenmesi ve proses optimizasyonu

Bu çalışmada, otomobil far yansıtıcı yüzeylerinin PVD kaplama proseslerinde koruyucu film tabakası oluşturmak için kullanılan HMDSO monomer salınım hattının Sonlu Hacimler Yöntemi ile vakum ortamı içerisine hat boyunca eşit oranda salınım yapılacak şekilde optimizasyonu sağlanmıştır. Bununla birlikte vakum ortamına salınan HMDSO monomerinin polimerizasyon öncesi eşit dağılımı için parça altlıkları dönüş mekanikleri CFD simülasyonları ile analiz edilmiş ve deneysel uygulamalar ile sonuçlar doğrulanmıştır.

Anahtar Kelimeler:

PVD, Fiziksel Buhar Biriktirme, HMDSO Polimerizasyon, İnce Film Tabakası, Metalizasyon

Numerical investigation and process optimization of hmdso polymerization in PVD vacuum environment for automotive industry

In this study, HMDSO monomer releasing system that is used to form a protective film layer on the automotive headlight reflective surfaces in the PVD coating processes, has been optimized to equally distribute through the releasing pipeline in vacuum condition by using finite volumes method. In addition, for uniform distribution of the HMDSO monomer release before polymerization into the vacuum medium, the substrate’s jig rotation mechanics were analyzed by CFD simulations and the results were verified by experimental applications.

Keywords:

PVD, Physical Vapor Deposition, HMDSO Polymerisation, Thin Film Layer, Metallisation,

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1. Hegemann D., Brunner H., Oehr C., Plasma treatment of polymers for surface and adhesion improvement, Nuclear Instruments and Methods in Physics Research Section B, 208, 281-286, 2003
2. Engel A.K., Yoden T., Sanui K. and N. Ogata, Synthesis of aromatic Schiff base oligomers at the air/water interface, Journal of American Chemical Sociecty (J. Am Chem. Soc.), 107, 8308-8310, 1985
3. Kakimato M., Suzuki M., T. Konishi, Imai Y., Iwamoto M. and Hino T., Preparatıon of mono- and multılayer fılms of aromatıc polyımıdes usıng Langmuır–Blodgett technıque, CSJ Journals Chemistry letters, 15 (5), 823-826, 1986
4. Kubono A., Higuchi H., Umemoto S. and Okui N. , Molecular orientation of alkyl-aromatic polyimide thin films prepared by vapour deposition polymerization, Thin Solid Films, 229 (1), 133-136, 1993
5. Ebihara K., Fujishima T., Kojyo D. and Murata M., Silicon oxide film preparation by RF plasma-enhanced MOCVD using hexamethyldisiloxane, Plasma Sources Science and Technology, 2 (1), 14, 1993
6. Hegemann D., Brunner H., Oehr C., Evaluation of deposition conditions to design plasma coatings lke SiOx and a-C:H on polymers, Surface and Coating Technologies, 174-175, 253-269, 2003
7. Pandiyaraj K., Kumar A.A., Ramkumar M.C., Kumar U.S., Gopinath P., Cools P., Geyter De N., Morent R., Bah M., Shah I.S., Su P., Deshmukh R.R., Effect of processing parameters on the deposition of SiOx-like coatings on the surface of polypropylene ﬁlms using glow discharge plasm assisted polymerization for tissue engineering applications, Vacuum, 143, 412-422, 2017
8. Freidrich J., Mechanisms of Plasma Polymerization – Reviewed from a Chemical Point of View, Plasma Processes and Polymers, 8 (1), 783-802, 2011
9. Vasile, M. J., Smolinsky G.. Organosilicon films formed by an RF plasma polymerization process Journal of the Electrochemical Society 119 (4) ,451-455, 1972
10. Yasuda H., Lamaze C. E., Polymerization in an electrodeless glow discharge. II. Olefinic monomers Journal of Applied Polymer Science 17(5), 1519-1531, 1973
11. Yasuda H., Lamaze C. E., Polymerization in an electrodeless glow discharge III. Organic compounds without olefinic doublebond Journal of Applied Polymer Science 17(5), 1533-1544, 1973
12. Mearns A. M., Insulator thin films formed by glow discharge and radiation techniques, Thin Solid Films, 3 (3) 201-228 1969
13. Hollahan J. R., Rare gas plasma polymerization of benzene at− 196°, Macromoleculer Chemistry and Physics, 154(1) , 303, 1972
14. Ansys Inc., ANSYS FLUENT theory guide, Canonsburg, PA, Release 15.0, 2-6, 2013
15. Wilcox D.C., Turbulence modeling for CFD, DCW industries, Vol. 2. La Canada, CA, 137-140, 1998
16. Sobachkin, A. and Dumnov G., Numerical basis of CAD-embedded CFD, NAFEMS World Congress, 7-11, 2013
17. Lamendola R., D’Agostino R, Fracassi F, This film deposation from hexamethyldisliloxane fed glow discharges, Plasmas and Polymers, 2 (3), 147-164, 1997
18. Schwarz J., Schmidt M. and Ohl A. , Synthesis of plasma-polymerized hexamethyldisiloxane (HMDSO) films by microwave discharge, Surface and Coating Technology, 98 (1-3),859-864, 1998
19. Morent R., Geyter N.D., Vlierberghe S.V., Dubruel P., Leys C. and Schacht E., Organic-inorganic behaviour of HMDSO films plasma-polymerized at athmospheric pressure”, Surface and Coating Technology, 203 (10-11), 1366-1372, 2009
20. Zajickova L., Bursikova V., Perina V., Mackova A., Subedi D., Janca J., Simirnov S., Plasma mofication of polycarbonates, Surface and Coating Technology 142-144, 449-454, 2001
21. Jamieson E.H.H. and Windle A.H., Structure and oxygen-barrier properties of metallized polymer film, Journal of Material. Sciences. 18 (1),64-80, 1983
22. İç Y.T. ve Yıldırım S., Çok Kriterli Karar Verme Yöntemleriyle Birlikte Taguchi Yöntemini Kullanarak Bir Ürünün Tasarımının Geliştirilmesi, Journal of the Faculty of Engineering and Architecture of Gazi University, 27 (2), 447-458, 2012