Çiğdem ORUÇ, Sevinç GÜLER, Hüseyin Murat LUŞ

Metal-Gözenekli Silisyum Direkt Hidrojen Pili Üretim Parametrelerinin Geliştirilmesi

Gözenekli silisyum (GS) üretim yöntemi olan, elektrokimyasal aşındırma (anodizasyon)koşullarının, Metal-Gözenekli Silisyum Direkt Hidrojen Pili (Metal-GS-DHP) elektrikselparametrelerine etkisi oldukça yüksektir. Bu çalışmada üretilen, n tipi, (111) yönelimli, tekkristal silisyumdan GS’nin 4 temel anodizasyon koşulu vardır (zaman, akım yoğunluğu, HForanı ve Işık aydınlatma). Anodizasyon zamanı 5-100 dakika, akım yoğunluğu 5-75 mA/cm2,HF:deiyonize H2O oranı 1:1- 1:11 ve ışık aydınlatma şiddeti 1000-7000 lüx aralıklarındauygulanmıştır .En iyi anodizasyon zamanı 40 dakika ve buna karşılık gelen Metal-GS-DHPelektriksel pil parametreleri, Voc= 590 mV Isc=30 µA’dir. En iyi akım yoğunluğu 20 mA/cm2ve buna karşılık gelen Metal-GS-DHP elektriksel pil parametreleri, Voc= 700 mV, Isc=15µA’dir. En iyi HF:H2O oranı 1:3 ve buna karşılık gelen Metal-GS-DHP elektriksel pilparametreleri, Voc= 420 mV, Isc=10 µA’dir. En iyi ışık aydınlatma şiddeti 4000 lüx ve bunakarşılık gelen Metal-GS-DHP elektriksel pil parametreleri, Voc= 540 mV Isc=18 µA’dir. Deneysonuçlarından anlaşılacağı üzere Metal-GS-DHP elektriksel pil parametreleri anodizasyonkoşullarına direkt bağlıdır.

Development of Metal-Porous Silicon Direct Hydrogen Fuel-Cell Production Parameters

Effect of the electrochemical etching (anodization) that is one of the manufacturing process of porous silicon (PS) on the electrical parameters of metal-porous silicon direct hydrogen cell (Metal-PS-DHC) is considerably high. There is 4 basic anodization parameters of n-type, (111) oriented, single crystal PS fabricated in this study (time, current density, HF ratio and light). 5- 100 Min. of anodization time, 5-75 mA/cm2 of current density, 1:1- 1:11 of HF:deionized H2O ratio and 1000-7000 lux light intensity is applied. The best anodization time is 40 minutes and corresponding Metal-PS-DHC electrical cell parameters are Voc= 590 mV and Isc=30 µA. The best HF: H2O ratio is 1:3 and the corresponding Metal-GS-DHP electrical cell parameters are Voc= 540 mV and Isc=18 µA. The best light intensity is 4000 lux and the corresponding MetalGS-DHP electrical cell parameters are Voc= 540 mV and Isc=18 µA. As the experimental results show, Metal-GS-DHP electrical cell parameters are directly related to the anodization conditions.

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