CF4 Gaz Karışımlarında Delinme Geriliminin Ölçülmesi ve Hesaplanması

Tetrafluoromethane (CF4), güç anahtarlama ve gaz izoleli kesicilerin endüstriyel uygulamalarında kullanılmasına rağmen güçlü bir sera gazıdır. Bu dezavantaj, CF4'ün Argon, Nitrojen gibi çeşitli gazlar ile karışımları yapılarak giderilir. Gazların dielektrik özelliklerinin irdelenmesi, delinme gerilimlerinin ölçülmesi ile mümkündür. Oluşturulan deney düzeneğinde 1mm ile 5mm arasında farklı elektrot açıklıklarında, CF4 gaz karışımlarının delinme gerilimleri ölçülmüştür. CF4+SF6 ve CF4+Argon gaz karışımlarının ölçülen delinme gerilimleri literatürdeki sonuçlar ile karşılaştırılarak, hem ölçüm düzeneği hem de ölçüm metodu doğrulanmıştır. Ardından, literatürde henüz yayınlanmamış olan CF4+N2 gaz karışımının delinme gerilimleri farklı elektrot aralıklarında ölçülmüştür.

Measurement and Calculation of Breakdown Voltages in CF4 Gas Mixtures

Tetrafluoromethane (CF4) has found industrial applications in power switching and gas insulated circuit breakers although it is considered to be a powerful greenhouse gas. This disadvantage can be overcome by mixing CF4 with gases like Argon and Nitrogen. In order to investigate the dielectric properties of the gases, the breakdown voltages must be measured. An experimental system is used to measure the breakdown voltages of CF4 gas mixtures for different electrode separation between 1 mm and 5mm. By comparing the measured breakdown voltages of CF4+SF6and CF4+Argon gas mixtures with the corresponding values in the literature, the measurement method and experimental system are verified. Then, the breakdown voltages of CF4+N2 gas mixture is measured, which is lack in the literature.

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  • [1] Nikitovic Z., Stojanovic V., Petrovic Z.L., "On the Role of Radicals in Kinetics of Plasma Etchers in Ar/CF4 Mixtures", Acta Physica Polonica A, 115, 4, 765-767, 2009.
  • [2] Christophorou L.G., Olthoff J.K., Rao M.V.V.S., "Electron interactions with SF6", J. Phys. Chem. Ref. Data, 25, 1341-1388, 1996.
  • [3] James D.R., Christophorou L.G., Mathis R.A., "New Unitary and Multicomponent Gaseous Dielectrics", Gaseous Dielectrics II, Editor: Christophorou L.G., Pergamon Press, New York, A.B.D., 115, 1980.
  • [4] Kopp M.K., Valentine K.H., Christophorou L.G., Carter J.G., "New Gas Mixture Improves Performance of 3He Neutron Counters", Nucl. Instrum. Methods, 201, 2-3, 395-401, 1982.
  • [5] Yamashita T., Kurashige H., Morii M.M., Nakamura T.T., Nomura T., Sasao N., Shibata K., Fukushima Y., Ikegami Y., Kobayashi H., Taniguchi T., "Measurements of Electron Drift Velocities and Positive Ion Mobilities for Gases Containing CF4 II", Nucl. Instrum. Methods Phys. Res. A, 317, 1-2, 213-220, 1992.
  • [6] Khechen W, Laghari J.R., "Breakdown Studies of SF6/Argon Gas Mixtures", IEEE Trans. Electr. Insul., 24, 6, 1141-1146, 1989.
  • [7] Maxwell Laboratories Inc., Bulletin # MLB-2138A1, 1982.
  • [8] Erden, M. A., "Toz Metalürjisi ile Üretilen Çeliklerde Nikel İlavesinin Mikroyapı ve Mekanik Özellikler Üzerine Etkisinin Araştırılması", Gazi Üniversitesi Fen Bilimleri Dergisi Part C: Tasarım ve Teknoloji, 4, 4, 241-245, 2016.
  • [9] Aksöz S., Özdemir A.T., Bostan B., "Alloyed AA2014 Aluminium Powders Synthesized With Carbon and Determined Properties", Journal of the Faculty of Engineering and Architecture of Gazi University, 27, 1, 109-115, 2012.
  • [10] Hebner G.A., Abraham I.C., Woodworth J.R., "Characterization of SF6 / Argon Plasmas for Microelectronics Applications", Sandia National Laboratories, SAND2002-0340 Unlimited Release Printed 2002.
  • [11] Tezcan S.S., Dincer M.S., Bektas S, Hiziroglu H.R., "Boltzmann Analysis of Electron Swarm Parameters in Binary CF4 + Ar Mixtures", IEEE Trans. Dielectr. Electr. Insul., 20, 1, 98-103, 2013.
  • [12] Singhasathein A., Pruksanubal A., Tanthanuch N., Rungseevijitprapa W., "Electron Swarm Parameters in Nitrogen Oxygen and Air", International Conference on Electrical Engineering/Electronics, Computer, Telecommunications and Information Technology, Krabi, Tayland, 15-17 Mayıs 2013.
  • [13] Christophorou L.G., Van Brunt R.J., "SF6/N2 Mixtures Basic and HV Insulation Properties", IEEE Trans. Dielectr. Electr. Insul., 2, 5, 952-1003, 1995.
  • [14] Raju G.R.G., Dincer M.S., "Measurement of Ionization and Attachment Coefficients in SF6 and SF6 + N2", Journal of Applied Physics, 53, 12, 8562-8567, 1982.
  • [15] Dincer M.S., Aydin T., "Simulation of Limiting Field Behavior in Electron Swarms in SF6 + N2 Gas Mixtures", IEEE Trans. Dielectr. Electr. Insul., 1, 1 , 139-145, 1994.
  • [16] Dincer M.S., Hiziroglu H.R., Bektas S., "The Behavior of N2 + SF6 Gas Mixtures Subjected to Orthogonal Electric and Magnetic Fields", IEEE Trans. Dielectr. Electr. Insul., 13, 2, 257-263, 2006.
  • [17] Raju G.R.G., Dincer M.S., "Monte-Carlo Simulation of Electron Swarms in Nitrogen in Uniform E X B Fields", IEEE Transactions on Plasma Science, 18, 5, 819-825, 1990.
  • [18] Tezcan S.S., Dincer M.S., Hiziroglu H.R., "Prediction of Breakdown Voltages in N2 + SF6 Gas Mixtures", IEEE Conference on Electrical Insulation and Dielectric Phenomena, 222-225, 15-18 Ekim 2006.
  • [19] Pedersen A., "On the Assessment of New Gaseous Dielectrics for GIS", IEEE Trans. Power App. Syst., 104, 8, 2233-2237, 1985.
  • [20] Farish O., Ibrahim O.E., Crichton B.H., "Effect of Electrode Surface Roughness on Breakdown in Nitrogen/SF6 Mixtures", Proc. IEE, 123, 10, 1047-1056, 1976. [21] High-voltage test techniques - Part 1: General definitions and test requirements, IEC Standard 60060-1 ed3.0, 2010.
  • [22] ASTM International, Designation D 149-97a (reapproved 2004).
  • [23] Tezcan S.S., Akcayol M.A., Ozerdem O.C., Dincer M.S., "Calculation of Electron Energy Distribution Functions from Electron Swarm Parameters Using Artificial Neural Network in SF6 and Argon", IEEE Trans. Plasma Sci., 38, 9, 2332-2339, 2010.
  • [24] Tezcan S.S., Duzkaya H., Dincer M.S., Hiziroglu H.R., "Assessment of Electron Swarm Parameters and Limiting Electric Fields in SF6+CF4+Ar Gas Mixtures", IEEE Trans. Dielectr. Electr. Insul., 23, 4, 1996-2005, 2016.
  • [25] Pinheiro M.J., Loureiro J., "Effective Ionization Coefficients and Electron Drift Velocities in Gas Mixtures of SF6 with He, Xe, CO2 and N2 from Boltzmann Analysis", J. Phys. D: Appl. Phys, 35, 3077-3084, 2002.
  • [26] Kurihara M., Petrovic Z.L., Makabe T., "Transport Coefficients and Scattering Cross-Sections for Plasma Modelling in CF4-Ar Mixtures: A Swarm Analysis", J. Phys. D: Appl. Phys., 33, 2146-2153, 2000.
  • [27] Hayashi M.. "Bibliography of Electron and Photon Cross Sections with Atoms and Molecules Published in the 20th Century - Argon". http://jila.colorado.edu/~avp/collision_data/electronneutral/hayashi.txt. Yayın tarihi: Haziran 2003. Erişim tarihi Ekim 2016.
  • [28] Yanguas-Gil A., Cotrino J., Alves L.L., "An Update of Argon Inelastic Cross Sections for Plasma Discharges", J. Phys. D: Appl. Phys, 38, 10, 1588-1598, 2005.
  • [29] Phelps A.V., Pitchford L.C., "Anisotropic Scattering of Electrons by N2 and Its Effect on Electron Transport", Physical Review A, 31, 5, 2932-2949, 1985
  • [30] Haddad A., Warne D., "Advances in High Voltage Engineering, The Institution of Engineering and Technology", United Kingdom, 2004.
  • [31] Husain E., Nema R.S., "Analysıs of Paschen Curves for Air, N2 and SF6 Using the Townsend Breakdown Equation", IEEE Trans. Electr. Insul., 17, 4, 350-353, 1982.