There were a lot of research on YBa2Cu3O7-δ (YBCO) superconducting materials and this material still draw attention.  In this research, thin films of commonly used superconducting YBCO ceramic material, grown on LaAlO3 (LAO), MgO and SrTiO3 (STO) substrates as thin films, which have different thermal expansion constants and lattice parameters, by Pulsed Laser Deposition (PLD) technique. For all growths, 150 mTorr partial Oxygen pressure, 5 cm substrate-target distance and 800 °C substrate temperature were used. Thin films were characterized for film quality and microstructure with X-Ray Diffraction (XRD), Scanning Electron Microscopy (SEM) and Energy Dispersive Spectroscopy (EDS) techniques. Analysis of these thin films showed that mainly c oriented (00l) YBCO thin films obtained with LAO and STO substrates which are more compatible than MgO substrates for YBCO growth.