Alev Püskürtme Piroliz Yöntemi KullanarakIGZO Nanopartiküllerinin Sentezi ve Karakterizasyonu

Yüksek elektron mobilitesi, düşük eşik gerilimi ve kaplama sonrası şeffaf özellik gösteren İndiyum Galyum Çinko Oksit (InGaZnO4, IGZO) malzemesi ekran teknolojilerinde artan bir ivmeyle kullanılmaktadır. Bu çalışmada, IGZO nanopartikülleri alev püskürtme piroliz yöntemi kullanılarak tek aşamada başarıyla sentezlendi. Üretilen nanopartiküllerin faz ve element analizleri, sırasıyla X-ışını kırınımı (XRD) ve X-ışını fotoelektron spektroskopisi (XPS) ölçümleriyle yapıldı. Isıl işlem öncesi XRD analizinde amorf yapı gözlemlenirken, 1200 oC de yapılan kalsinasyon sonucu rombohedral kristalin $InGaZnO_4$ yapısı tespit edildi. Elementel analiz sonucunda yapı içerisinde In, Ga, Zn ve O elementlerinin varlığı kanıtlandı. Yüzey morfolojisi ve partikül büyüklüğü taramalı elektron mikroskobu (SEM) kullanılarak tespit edilirken, nanopartiküllerin parçacık boyutlarının

Synthesis and Characterization of IGZO Nanoparticles Using Flame Spray Pyrolysis Method

The Indium Gallium Zinc Oxide (InGaZnO4, IGZO) material, which shows high electron mobility, low threshold voltage and transparent after coating, has been used with increasing acceleration in screen technologies. The flame spray pyrolysis technique was used to successfully synthesize IGZO nanoparticles in one step in this study. X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS) measurements were used to determine the phase and elemental composition of the nanoparticles, respectively. While the amorphous structure was observed in the XRD analysis prior to the heat treatment, the 4InGaZnO_4$ structure of the rhombohedral crystal was determined through calcination at 1200 oC. As a result of elemental analysis, the presence of In, Ga, Zn and O elements in the structure was proven. The scanning electron microscopy (SEM) was used to determine the surface morphology and particle size of nanoparticles, which were found to be less than 100 nm in size and hemispherical. The photoluminescence and optical decay time characterizations of nanoparticles were studied under UV excitation and IGZO nanoparticles exhibited emission around 510 nm and 570 nm at 380 nm excitation. Under these conditions of excitation and emission, the optical decay time was computed as bi-exponentials and 32.36 µs.

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