Şenol KAYA, Erhan BUDAK, Ercan YILMAZ

Effects of annealing temperature on electrical characteristics of sputtered Al/Al 2 O 3 /p-Si (MOS) capacitors

Turkish Journal of Physics

2018-Cilt: 42 - Sayı: 4

470-477

Al/Al 2 O 3 /p-Si (MOS) capacitors, annealing effect, interface states, series resistance

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