Riadh TOUMI, Yahia KOURD, Dimitri LEFEBVRE

A novel fault detection approach based on multilinear sparse PCA: application on the semiconductor manufacturing processes

A novel fault detection approach based on multilinear sparse PCA: application on the semiconductor manufacturing processes

Turkish Journal of Electrical Engineering and Computer Sciences

2022-Cilt: 30 - Sayı: 4

1586-1599

36 46