THE CHANGE OF LINE RATIO OF OPTICAL EMISSION SPECTRA WITH TIME FOR INDUCTIVE RADIO FREQUENCY ARGON DISCHARGE AT LOW PRESSURE
In this study, inductive radio-frequency (RF) argon (Ar) discharge and afterglow downstream discharge at low pressure were investigated with optical emission spectroscopy (OES). Spectral lines recorded with OES measurements were detected in the wavelength range of 650-900 nm. For all measurements, a spectrum line that remained at approximately the same value was taken as the value of the reference wavelength throughout the study. The changes in the optical emission spectrum ratios of the inductive RF Ar discharge and the afterglow downstream discharge with respect to time were compared. As a result, it was reported that some transitions for both regions were to be increased in time. The transitions in time for some wavelengths (738.39, 751.47, 772.42, 801.48, 810.37 and 842.46 nm) have been approximately improved between 20% and 34% for discharge zone. Also, it can be increased for wavelength of 801.48 nm in afterglow downstream discharge region (32.55%).
Keywords:
Discharge in vacuum, Ionization of plasma, Plasma properties High frequency and RF discharge,
___
- Bogaerts A, Neyts E, Gijbels R, van der Mullen J. Gas discharge plasmas and their applications. Spectrochim. Acta Part B 2002; 57: 609–658.
- Descoeudres A, Hollenstein C, Demellayer R, Wälder G. Optical emission spectroscopy of electrical discharge machining plasma. Journal of Materials Processing Tech. 2004; 149: 184-190.
- Canal GP, Luna H, Galv ́ao RMO, Castell R. An approach to a non-LTE Saha equation based on the Druyvesteyn energy distribution function: a comparison between the electron temperature obtained from OES and the Langmuir probe analysis. J. Phys. D: Appl. Phys. 2009; 42: 135202 (6pp).
- Roth JR Industrial Plasma Engineering Volume 1: Principles, London: IOP Publishing Ltd, 1995.
- Donnelly VM. Plasma electron temperatures and electron energy distributions measured by trace rare gases optical emission spectroscopy. J. Phys. D: Appl. Phys. 2004; 37: R217-R236.
- Tanışlı M, Rafatov İ, Şahin N, Mertadam S, Demir S. Spectroscopic study and numerical simulation of low-pressure radio-frequency capacitive discharge with argon downstream. Can. J. Phys. 2017; 95: 190-200.
- https://physics.nist.gov/PhysRefData/ASD/lines_form.html (Available: 01.08.2019)
- Musa G, Ciobotaru CL, Chiru P, Baltog A. The M-effect in argon-hydrogen gas mixtures. J. Opt. Adv. Materials 2004; 6: 459-464.
- Tanisli M and Sahin N. Optical characteristics for capacitively and inductively radio frequency discharge and post-discharge of helium. Phys. Plas. 2016; 23: 013513.
- Luo D, Ma D, He Y, Li X, Wang S, Duan Y. Needle electrode-based microplasma formed in a cavity chamber for optical emission spectrometric detection of volatile organic compounds through a filter paper sampling. Microchemical Journal 2017; 130: 33-39.
- Siepa S, Danko S, Tsankov TV, Mussenbrock T, Czarnetzki U. On the OES line-ratio technique in argon and argon-containing plasmas. J. Phys. D: Appl. Phys. 2014; 47: 445201 (16pp).
- ISSN: 2667-4211
- Yayın Aralığı: Yılda 4 Sayı
- Başlangıç: 2000
- Yayıncı: Eskişehir Teknik Üniversitesi
Sayıdaki Diğer Makaleler
Amal MERSNİ, Olena NEVZOROVA, Yelyzaveta TOLSTYKH