Ahmet Kürşat BİLGİLİ, Ömer AKPINAR, Mustafa Kemal ÖZTÜRK, Süleyman ÖZÇELİK, Ekmel ÖZBAY

InGaN/GaN Yapılar için XRD-Raman Karşılaştırması

Bu çalışmada, InGaN/GaN yapılar Metal Organik Kimyasal Buhar Biriktirme (MOCVD) yöntemiyle büyütülmüştür. Bu InGaN/GaN yapıların bazı yapısal, optik ve morfolojik özellikleri detaylı olarak incelenmiştir. Yapısal analiz için X-ışınları kırınımı (XRD), optik özellikler için Raman ve morfolojik özellikler için Atomik Kuvvet Mikroskobu (AFM) kullanılmıştır. XRD analizine göre her iki örnek altıgensel yapı sergilemiştir. Bu iki örnek için elde edilen XRD pikleri büyütme şartlarına bağlı olarak küçük farklılıklar göstermiştir. Gerilme ve stress değerleri XRD den elde edilip Raman sonuçlarıyla kıyaslanmıştır. Raman analizinde, her iki örnekte beş farklı kimyasal tespit edilmiştir. Raman analizi sonuçları XRD ile büyütme koşulları ile ve AFM görüntüleriyle iyi bir uyum içindedir. AFM görüntülerinde tepeler ve çukurlar görülebilir ve bunlar kısmen homojendir. AFM görüntülerinde bir de beyaz bölgeler vardır. Raman pik merkezi verilerine göre bu beyaz bölgeler Beyaz Pastır.

XRD vs Raman for InGaN/GaN Structures

In this study, InGaN/GaN structures are grown by using Metal Organic Chemical Vapor Deposition (MOCVD) technique. Somestructural, optical and morphological properties of InGaN/GaN structures are investigated in detail. For structural analysis, X-raydiffraction (XRD), for optical, Raman and morphological, Atomic Force Microscopy (AFM) measurement techniques are used. InXRD analysis both samples presented hexagonal crystal structure. XRD peaks for these two samples showed small differencesdependent on growth conditions. Strain and stress values are determined from XRD and they are compared with Raman results. InRaman analysis, five different chemicals are determined in both samples. Raman analysis results are in good accordance with XRD,growth conditions and AFM images. In AFM images, there can be seen hills and holes and they are partly homogeneous. Thereare also some white regions in AFM images. According to Raman peak center data, these white regions are detected as white rust.

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