TARIK ASAR, Burak KORKMAZ, H. İbrahim EFKERE, Nihan AKIN, SÜLEYMAN ÖZÇELİK

In2O3 ince filmlerin yapısal, morfolojik, optik ve elektriksel özelliklerinin incelenmesi: gaz sensörü uygulamaları

Bu çalışmada, RF magnetron püskürtme yöntemi ile 50W ve 100W güç değerlerinde, iki adet In2O3 ince film üretildi. Üretilen ince filmlerin yapısal, morfolojik ve optik özellikleri belirlendi. In2O3 ince filmlerin sensör fabrikasyonları tamamlanarak, In2O3 gaz sensörleri elde edildi. Gaz sensörleri; bütan gazı konsantrasyonu, uygulama voltajı ve sensör çalışma sıcaklığı değiştirilerek test edildi. Test sonuçları incelendiğinde, üretilen her iki sensörün de farklı sensör çalışma sıcaklığı ve gaz konsantrasyonları için kullanıma uygun olduğu görüldü.

Anahtar Kelimeler:

Metal oksit yarıiletken, indiyum oksit, gaz sensörü

Investigation of the structural, morphological, optical and electrical properties of In2O3 thin films: gas sensor applications

In this study, two In2O3 thin films were prepared at 50W and 100W target power by using RF magnetron sputtering technique. The structural, morphological and optical properties of the produced thin films were investigated. The In2O3 gas sensors were produced by completing the fabrications of In2O3 thin films. The gas sensors were tested with changing butane gas concentration, application voltage and sensor operating temperature. When the test results were examined, it was seen that both of the produced sensors were found to be suitable for using with different sensor operating temperatures and gas concentrations.

Keywords:

Metal oxide semiconductor, indium oxide, gas sensor,

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