Düşük Hidrojen Gaz Konsantrasyonunda Tungsten katkılı ZnO İnce filmlerin Gaz Sensörü Uygulamaları

Son zamanlarda, dizel, benzin ve propan gazı gibi fosil kaynaklardan gelen enerjinin yerini alabilecek alternatif bir enerji kaynağı olarak hidrojen gazının uygulanması için çalışmalar hızla önem kazanmaya başlamıştır. Bu nedenle, hidrojen gazı, vaat edilen alternatif bir enerji kaynağı olmanın ötesine geçtiği başlıca enerji kaynaklarından biri olarak kabul edilmektedir. Ancak, hidrojen gazı patlayıcıdır ve büyük bir yangına neden olabilir. Bu gazın rengi, kokusu ve tadı olmadığından, güvenlik için minimum miktarda hidrojen gazı algılayabilen çok hassas bir gaz sensörü üretimi yapılmalıdır. Dahası, hidrojen gazı son derece hafiftir ve atmosfere kolayca yayılır. Gaz konsantrasyonu % 4'ün üzerinde olduğunda bir patlama meydana gelebilir; bu nedenle ppm ölçekli hidrojen gazı algılayabilen sensörler geliştirilmelidir. Bu çalışmada Tungten (W) katkılı ZnO ince filmler kimyasal banyolama tekniği ile %1 ve % 2 katkılı olarak büyütüldü ve Hidrojen gaz (H2) algılama özellikleri incelendi. Üretilen numunenin farklı sıcaklıklarda (30°C-160°C) ve 5 ppm-100 ppm gaz konsantrasyonu aralığında elektriksel karakterizasyonu yapıldı. Çalışma sıcaklığı 100 C olarak bulundu. Sensörler, 5 ppm H2 gaz konsantrasyonuna karşı kabul edilebilir düzeyde duyarlılık sergiledi. %1 W-katkılı ZnO ince film 100 °C çalışma sıcaklığında diğer ince filmlere kıyasla daha yüksek algılama performansı gösterdi. %1 W-katkılı ZnO ince film 5 ppm H2 gazına karşı % 28,56 duyarlılık sergilerken, %2 W-katkılı ZnO ince film % 7 duyarlılık sergilediği hesaplandı. Ölçüm sonuçları, numunelerin gaz algılama özelliklerinin katkılamaya bağlı olarak değiştiğini gösterdi.

Anahtar Kelimeler:

Kimyasal banyolama tekniği, gaz sensör, hidrojen gazı, katkılama, duyarlılık

Gas Sensor Applications of Tungsten Doped ZnO Thin Films in Low Hydrogen Gas Concentration

Recently, studies have been conducted to apply hydrogen gas as an alternative energy source that can replace energy from fossil sources such as diesel, gasoline, and propane gas. Therefore, hydrogen gas is regarded as one of the major energy sources it has gone beyond just a promise alternative energy source of energy. However, hydrogen gas is explosive, and it can cause a massive conflagration. Since this gas has no color, smell, and taste, highly sensitive gas sensor that can detect a minimal amounts of hydrogen gas must be installed for safety. An explosion can occur when the gas concentration is above 4%; for this reason, sensors that can detect ppm scale hydrogen gas must be developed. In this study, 1% and 2% Tungten (W) doped ZnO thin films were grown by chemical bathing technique and Hydrogen gas (H2) sensing properties were investigated. Electrical characterization of the samples at different temperatures (30 ° C-160 ° C) and different gas concentrations (5 ppm-100 ppm) was performed. The operating temperature was found at 100 C. The sensors exhibited acceptable sensitivity to 5 ppm H2 gas. 1% W-doped ZnO thin film showed higher sensing performance than other thin films at 100 ° C . 1 % W-doped ZnO thin film exhibited 28.56 % sensitivity to 5 ppm H2 gas, while the 2 % W-doped ZnO thin film exhibited 7% sensitivity. The results showed that the gas sensing properties of the samples varied depending on the doping.

Keywords:

Chemical bath deposition, gas sensor, hydrogen gas, doping, response,

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