Nihan AKIN SÖNMEZ, Meltem DÖNMEZ, Buse CÖMERT, Tarık Asar, Barış KINACI, Süleyman Özçelik

n-Si ve PET alttaşlar üzerine RF-kaplanan GZO ince filmlere tavlama sıcaklığının etkileri

Mikro takımların uç nokta Frekans Tepki Fonksiyonları (FTF) darbe testi ve modal (biçim) analizi vasıtası ile belirlenememektedir. Ayrıca, mikro işlemler yüksek hızlarda gerçekleştirilmekte ve jiroskopik momentler ve merkezkaç kuvvetleri nedeniyle takım uç nokta FTF’sinde değişimler meydana gelmektedir. Bu çalışmada, mikro takımlar kesici uç geometrisini ve operasyon etkilerini içerecek şekilde analitik olarak modellenmiştir. Ayrıca, iş mili geometrisinin bilinmediği durumlar için deneysel olarak elde edilen durağan iş mili dinamiği ve analitik olarak hesaplanan dönen takım ve tutucu dinamiğinin birleştirilmesini mümkün kılan yeni bir yöntem geliştirilmiştir.

Anahtar Kelimeler:

Galyum katkılı çinko oksit, tavlama, UV sensör

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